UNAM Cleanroom

UNAM PTF form [in Turkish]

UNAM hosts a 400 m2 cleanroom laboratory including class 100 and class 1000 lab spaces for micro/nano-fabrication processes. UNAM cleanroom consists of four parts: (1) Epitaxial material growth division (2) lithography (yellow) room (3) thin film deposition and etching division and (4) device characterization (dark) room. The cleanroom is designed in such a purpose that a researcher will be able to grow, fabricate, and test his/her samples in the same laboratory. UNAM cleanroom is open for researchers all over Turkey (universities, institutes, companies and governmental organizations) and functions as the first comprehensive national user facility in Turkey.

Equipment Inventory

Automatic/Manual Gas Cabinets with Ultrapure Process Gases
Stainless Steel Process Gas Lines
Scrubber System for Toxic Waste Process Gases
Ultrapure De-ionized Water Generator Syste
Asher
Atomic Layer Deposition (ALD)
Atomic Layer Deposition (ALD)
Critical Point Dryer
Dicing Saw
E-Beam Evaporation
E-Beam Lithography
Hot Plates
Inductively Coupled Plasma (III-V)
Inductively Coupled Plasma (Si)

LCR Meter
LPCVD
Mask Aligner
Mask Aligner with Nanoimprint Lithography
Mask Writer
Network Analyzer
Optical Microscopes
Optical Profilometer
Optical Spectrum Analyzer
Organic Thin Film Evaporator
Oxidation Furnace
Parameter Analyzer
PECVD

Probe Stations
Rapid Thermal Annealing (RTA)
Scanning Electron Microscope (SEM)
Semiconductor Parameter Analyzer
Signal generator
Spectrum Analyzer
Spinners
Sputtering System
Stylus Profilometer
Thermal Evaporator
Thermal Evaporation System
Vacuum Ovens
Wire Bonder

UNAM was established and is being supported by the State Planning Organization (DPT) of Turkey
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