icon UNAM Hosted the First “International Workshop on Cleanroom Training”.

UNAM hosted the first “International Workshop on Cleanroom Training” program, held between 21 June and 4 July 2010. The two-week program was co-organized by UNIDO (United Nations Industrial Development Organization) and UNAM, and supported by Turkish Ministry of Industry and Trade and TİKA (Turkish International Cooperation and Development Agency). In total 48 participants (31 international + 17 Turkish) from 20 countries including researchers and scientists, professionals from governmental and private sector organizations and companies, and graduate students were admitted to the workshop. The composition of the 31 international participants from 19 different countries was as the following:

Armenia (2)

Georgia (2)

Moldova (2)

Syria (2)

Azerbaijan (5)

Iran (1)

Mongolia (1)

Tajikistan (1)

Bangladesh (1)

Iraq (1)

Pakistan (2)

Ukraine (2)

Belarus (2)

Kazakhstan (2)

Serbia (1)

Uzbekistan (1)

Bosnia-Herzegovina (1)

Kyrgyzstan (1)

Sudan (1)


17 national participants were selected from 15 different institutes and organizations:

ASELSAN Inc. – Ankara (2)

Melikşah University – Kayseri (1)

Atatürk University – Erzurum (1)

Niğde University – Niğde (1)

Bilkent University – Ankara (2)

Middle East Technical University – Ankara (1)

BİLUzay – Ankara (1)

Pamukkale University – Denizli (1)

Cumhuriyet University – Sivas (1)

ROKETSAN Inc. – Ankara (1)

Harran University – Urfa (1)

Ministry of Industry and Trade – Ankara (1)

Istanbul Technical University – İstanbul (1)

Turkish Standards Institute – İzmit (1)

Karadeniz Technical University – Trabzon (1)


The workshop commenced with a welcome session and opening reception in which members and representatives from the Turkish Parliament, Ministry of Industry and Trade, TIKA, UNIDO, Bilkent University and UNAM stressed the importance of such international meetings not only for exchange of scientific knowledge and technological know-how, but also for building apolitical bridges and transnational cooperation opportunities between the participant countries. Among the distinguished guests who delivered a welcome speech, Prof. Ali Doğramacı – President of Bilkent University, Prof. Salim Çıracı – Director of UNAM, Mr. Dalibor Kysela – UNIDO Field Operations Officer, Mr. Süleyman Yılmaz, Director of UNIDO Centre for Regional Cooperation, Dr. Mustafa Şahin – Vice President of TIKA, Mr. İsmail Kayıplar – Deputy Director General of The Ministry of Industry and Trade-Directorate General for European Union Coordination, and Hon. Mr. Reha Denemeç – Member of the Turkish Parliament, warmly welcomed the participants, shared their success wishes and acknowledged the individuals and organizations who organized the program.
The first week of the workshop was devoted to lectures, seminars and technical visits to cleanroom laboratory facilities. In the second week, hands-on laboratory practice in UNAM Cleanroom Facility (UCF) and tool presentation & demonstration sessions by equipment vendors were carried out. At the end of the program, the successful participants were handed certificates signed by UNIDO, Ministry of Industry and Trade, and UNAM.
scienceawardsOn the first day of the workshop, UCF coordinator Dr. Necmi Bıyıklı overviewed the laboratory installation history, infrastructure, and equipment inventory and summarized the opportunities of UCF. In addition, Dr. Bıyıklı delivered a seminar on cleanroom laboratory safety. In the late afternoon, a detailed UNAM-tour was done, and all UNAM-laboratory facilities were visited. The day ended with the UCF orientation program and UCF tour. In the 2nd, 3rd, and 4th days of the program, participants attended lectures about cleanroom micro and nano-fabrication techniques, processes and equipments delivered by Bilkent University and UNAM faculty Dr. Aykutlu Dana, Dr. Bilge Imer, Dr. Ali Kemal Okyay, and Dr. Necmi Bıyıklı. Lithography, thin-film deposition, wet and dry etching, epitaxial film growth and chemical vapor deposition techniques, materials and device characterization techniques were covered in detail. Fourth day afternoon, ASELSAN Cleanroom Facilities were visited.
The following two days, the participants had the opportunity to attend 9 distinct seminars delivered by distinguished national and international academicians who carried out their materials and device research in cleanroom laboratories. With their seminars, Dr. Saif Islam (University of California at Davis), Dr. Haluk Külah (METU), Dr. Hakan Ürey (Koç University), Dr. Tayfun Akın (METU), Dr. Mehmet Bayındır (Bilkent University), Dr. Erdem Alaca (Koç University), Dr. Cem Öztürk (Sabancı University), Dr. Feridun Ay (University of Twente) and Dr. Bedri Çetiner (Utah State University) demonstrated that cleanroom micro and nano-fabrication technology is and can be used to explore and develop device technologies that can be used in many different disciplines and applications. In between these seminars, the cleanroom facility at METU-MEMS research center was visited under the guidance of Dr. Tayfun Akın, director of the center.
After the one-day Cappadocia excursion, the second part of the workshop program – hands-on laboratory practice and tool demonstrations commenced at UNAM building. The total participant group of 48 was divided into 4 sub-groups of 12, to enhance the efficiency of lab and tool demo sessions. During 5 days, interchanging in the morning and afternoon sessions, 2 groups entered the cleanroom for hands-on lab practice in UCF, each group at a different station (equipment) and the remaining 2 groups attended the presentation and tool demonstration sessions by the equipment vendors. In this way, under the coordination of Dr. Necmi Bilir and Dr. Necmi Bıyıklı and supervision of UCF technical staff (Mr. Semih Yaşar, Mr. Mustafa Kemal Ruhi, Mr. Adem Saraç, and Mr. Fikret Piri), each sub-group experienced the following 5 lab practice:

  1. SiO2 thin film growth using plasma enhanced chemical vapour deposition (PECVD) system and measurement of optical constants of the thin film grown using ellipsometer system
  2. Thin film deposition of metallic Cr by electron-beam (E-beam) evaporator system.
  3. Photo-mask design, mask generation using direct laser-writer, photolithography process (sample cleaning, photoresist coating, mask-alignment and exposure, sample development, optical microscope analysis)
  4. Cr, SiO2 and Si layer etching using wet (chemical) and dry (plasma) etching techniques; etch-depth profiling and etch-rate analysis using surface profilometer
  5. Scanning electron microscope (SEM) and white-light interferometric 3-D profilometer for imaging the fabricated cantilever devices

In parallel with the UCF hands-on lap practice sessions, the participants also had the opportunity to attend the technical presentations and hands-on tool demonstrations provided by some of the UCF equipment vendors. Representatives from the following companies have contributed to the workshop:

  1. FEI (Netherlands) + Anatek (Turkish representative): Electron microscopes (SEM, TEM), E-beam lithography and focused ion beam (FIB) systems and applications
  2. EVG (Austria) + İmtek (Turkish representative): Photolithography equipments and mask aligner equipments, photolithography process applications
  3. Thermo Fisher Scientific (Germany) + Redoks (Turkish representative): X-ray photoelectron spectroscopy (XPS) systems and applications
  4. Cascade Microtech (Germany/U.S.A.) + Spark Ölçüm Teknolojileri (Turkish representative): DC and RF Probe Stations, electrical characterization
  5. VAKSİS (Turkey): Thin film vacuum deposition systems (thermal evaporator, e-beam evaporator, sputtering, and PECVD systems)

At the end of the two-week intense workshop program, 48 participants who successfully attended the lectures, seminars, technical visits, lab-practices and tool demos deserved to receive their certificates signed by UNIDO, MoIT, and UNAM. The program ended with a closing dinner with common remarks that this program should be a starting point for new collaborations and bilateral cooperations.
UNAM would like to thank the UNAM academic staff, administrative staff, technical and support staff, the distinguished national and international academicians, ASELSAN and METU-MEMS facility manager and personnel, UNIDO, MoIT, TIKA, and Bilkent University for their contributions which made this program a successful event.

[ Pictures from Workshop ]