E-Beam Lithography
Contact
Manager: R. Asst. Prof. Aykutlu Dana
Operator: Koray Mızrak | Tel: +90 (312) 290 3549 | E-mail: mizrak(at)unam.bilkent.edu.tr
Backup: Murat C. Kılınç, Özlem Şenlik
Equipment Card
Make: FEI & Raith
Model: FEI Nova NanoSEM 600 + Raith ElphyPlus
Location: UNAM-BL12
Documents
| Title | Description |
|---|---|
 Operating Instructions |
Users must read the document before training |
| Application Note |
Resist process data NANO PMMA 06 |
| Application Note |
Resist process data NANO PMMA 04 |
| Application Note |
Resist process data NANO PMMA 02 |
